Atmospheric Plasma Cleaner can be applied to wide range of usage such as electronic material by utilizing high-activation of high-energy electron and radical ion in plasma reaction.

This equipment has a lot of advantages;

• Vacuum Process is not required
• Simple Utility Preparation (Reaction gas and power supply only)
• Setting space also is saved (because of no vacuum system)
• Vacuum tank is not required so that the wider space is available for various purposes.

• The sample can be directly plasma-processed just by putting it on the stage.
• Low Temp. Plasma is available because of the atmospheric glow-discharging plasma
• Easily applied to In-line system because of no vacuum system.

Application

• Surface treatment for high polymer materials
• Glass panel cleaning for FPD
• Ashing treatment
• Surface activation(Oxidation or Deoxidization)