Low Temperature Asher
PR300/301
Model
300 301
Method
Barrel type of DP
DP : direct plasma
High-frequency Output
Max.300W
Oscillating Frequency
13.56MHz
Reaction Chamber
ø64×160mm
3 chambers		 ø118×160mm
1 chamber

The PR 300 is a gas plasma device that is used widely for such applications as production of semiconductors and analysis work. It boasts outstanding operabi lity and safety, with an automatic tuning system as a standard component and other features. It has a compact design, with a small-size HF generator and an oscillation section integrated with a portion of the chamber, allowing it to be installed into a 19-inch rack.

  • Three 64mm diameter chambers are included. (PR300)
  • The unit can be set for a wide range of output conditions to handle a variety of testing samples.
  • One 118mm diameter large chamber is accommodated.
PR301
PR301
PR300
* The gas plasma equipment has a wide range of applications from ashing, etching, dry cleaning, etc.


Reaction Chamber
PR300 Reaction Chamber PR301 Reaction Chamber
Control Panel  
PR300 Control Panel  


Operation Flowchart
PR300 Operation Flowchart
Piping System Diagram (PR300)
PR300 Piping System Daigram


Specifications
Model PR300 PR301
* Method Barrel type of direct plasma
* Control part
High frequency output Max. 300W (100W×3 chambers for PR300)
Oscillating frequency 13.56 MHz
Output impedance 50Ω
Tuning method Manual biaxial tuning method
Instrument Output watt meter (0 to 300W)
Reflected wave watt meter (0 to 100W)
Vacuum gauge, bourdon's tube type
Flow meter, needle valve integrated type, 1 set
Timer 0.1sec. to 999h
Gas inlet 1/4" stainless steel
Power source (50/60Hz) AC 100/220V, single phase, 1 kVA
* Reaction part
Reaction chamber Made of pyrex glass, ø64×160mm×3 chambers Made of pyrex glass, ø118×160mm x 1 chamber
Electrode structure Condenser type, 2-way split
Control system Auto pressure reduction, auto leak valve
Piping material Stainless steel, Teflon, Copper and Brass Stainless steel, Teflon
External dimensions(W×D×Hmm) 438×520×556 438×520×630
Weight Approx. 38kg Approx. 34kg
* Standard Accessories
 
  • Vacuum grease :1 pc
  • O-ring for reaction chamber :6 pcs.(for PR300) , 1pc. (for PR301)
  • Sample dish (large and small) :each 1 set (for PR300 only)
* Optional Accessories
*Vacuum Pump *Vacuum Hose *Rubber Tube Adapter *Center Ring *Clamp
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