| Plasma Dry Cleaner |
| PDC610/610G |
|
|
| Stage size |
| 250 mm x 220 mm 1-stage, 2-stages, 3-stages selectable |
|
| Compact multi stage plasma cleaner |
■Applications
- Improvement of adhesiveness of various materials and surface reformation
- Light ashing and light etching process
- Pretreatment of implemented board bonding
- Pretreatment of plastic package
- Pretreatment of print board plating
- Processing of LED related commercial products
- Washing of electronic parts
- Peeling of resist or removing residues after wetting process
- Washing of accuracy parts including optical parts, dies, or machine parts
- Reformation of resin surface including fluoro resin
- Supports FCC
■Features
- Maximum power of 600W with compact package
- Electrodes can be switched among 1-stage, 2-stages, and 3-stages
- Supports processing of a vertical magazine
- RIE/DP modes selectable
- Supports integrated data logger (optional)
- Matching point memory function (optional)
|
 Specifications |
| Product code |
328216 |
299439 |
| Model |
PDC610 |
PDC610G |
| Plasma mode |
RIE/DP |
| Electrode structure |
3-stage independent parallel flat plates |
| High frequency output |
Max. 600W |
| Outgoing frequency |
13.56 MHz |
| Control and display system |
Sequencer and touch panel |
| Chamber size |
350 x 270 x 300 mm |
| Chamber material |
A5052 |
| Reactive gas |
2 systems (argon and oxygen) |
| Purge gas |
Nitrogen or dry air |
| Vacuum pump |
Rotary vacuum pump (Approx. 345 L/min) |
| External size |
600 x 722 x 700 mm |
| Exterior material |
Stainless steel |
| Power supply |
3-phase AC200 50/60 Hz |
3-phase AC200-230V 50/60 Hz |
| Overseas standards |
FCC |
FCC/CE marking |
 Control panel |
 |
Control panel |
 |
 |
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