 Plasma Reactor
DP Mode, Barrel Type
For Pre-Treatment of Asbestos Analysis
High Frequency Output : 0~300W |
Plasma Reactor
Wide Diameter, DP Mode, Barrel Type
High Frequency Output : 0~500W |
 PR301 |
 PR500 |
| PR300 / 301 |
| Oscillation Frequency |
Reaction Chamber |
| 13.56MHz |
3 Chambers -ø64x160mm (PR300) |
| 13.56MHz |
1 Chamber -ø118x160mm (PR301) |
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Plasma Cleaner
For Various Testings and Cleanings
(for Substraits such as BGA, etc.)
High Frequency Output : 300W(PDC200)
High Frequency Output : 500W(PDC210)
High Frequency Output : 500W(PDC510) |
Plasma Cleaner
Small Type, Multi-Layers |
 PDC210 |
 PDC610 |
| PDC200 / 210 / 510 |
| Stage |
Chamber Dimensions |
| 250x170mm |
400Wx250Dx150Hmm(PDC200/210) |
| 400x200mm |
500Wx300Dx200Hmm(PDC510) |
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In-Line Plasma Cleaner
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Plasma Cleaner (Big Capacity)
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 ISP500LU |
 V-1000 |
| ISP500LU |
| Plasma Mode |
Chamber Dimensions |
| RIE |
344Wx230Dx45Hmm |
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| V1000 / 1000X / 1000XS |
| Oscillation Frequency |
Effective Stage Dimensions |
| 13.56MHz |
280Wx280Dmm(V1000) |
| 13.56MHz |
300Wx300Dmm(V1000X) |
| 13.56MHz |
400Wx375Dmm(V1000XS) |
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Atmospheric Plasma Cleaner
Plasma Processing in Open Air Environment |
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 YAP510 |
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