Gas Plasma Ashers PB600/PB1000S/PA600D

Gas Plasma Ashers

PB600/PB1000S/PA600D

The PB series are of barred type of direct plasma method, and can be operated automatically by simple setting.
The model PA600is a plasma ashing system after the downflow method, which copes with a 6-inch wafer.

PB600/PB1000S/PA600D

PB/PS Downflow method Downflow method

Specifications

Model	PB600	PB1000S	PA600D
Plasma method	Barred type of DP mode		DF mode
Electrode	Split of Opposite electrode structure		Round type electrode structure
RF generator	0 to 600W	50 to 1,000W	0 to 600W
Oscillating frequency	13.56MHz
Control system	Digital display with PLC control	Touch panel with PLC	Digital display with one touch operation
Tuning method	Automatic and Manual tuning
Timer	1 sec. to 9H 59min.59 sec.
Chamber	Made of quart glass
Chamber size	ø200×300mmL	ø300×500mmL	Adapt for 6 inch wafer
Chamber temperature	Digital display
Reaction gas	O2,CF4 or others		O2,Ar,CF4,C5F8,SF6 or others
Purge gas	N2 or Dry air
Flow meter	Flow meter 1 line (O2 0 to 1,000 ml/min.)	Mass flow control with digital display (CF4 0 to 300sccm, O2 0 to 1,000sccm)
Vacuum gauge	Piranie type (0.4 to 3,000Pa/0.004 to 30Torr)	Digital display (0.4 to 3,000Pa/0.004 to 30Torr)
Vacuum pump	250 ml/min.	700 ml/min.
Emargency stop switch	Push type switch
Gas port	1 line (1/4" SUS Swagelok)	2 line (1/4" SUS Swagelok)
Purge port	1 line (1/4" SUS Swagelok)	1 line (1/4" SUS Swagelok)
Vacuum port	1 line ( SUS NW25)	1 line ( SUS NW25)
External dimensions	500mmW×600mmD×650mmH	640mmW×850mmD×1,695mmH	650mmW×800mmD×1,500mmH
Power supply	AC200/220/380V, 3 phase and AC100/220V, single phase
Weight	Approx. 130kg	Approx. 180kg	Approx. 150kg