| MPC600 |
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- RIE • DP mode
- Electrode stage - up to 6 inch
- RF power is up to MAX. 600W
- One touch control
- Made of quart glass chamber
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Specifications
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| Model |
MPC600 |
| Method |
RIE • DP mode |
| Electrode |
Aluminum round type |
| RF generator |
50 - 600W |
| Oscillating frequency |
13.56MHz |
| Control system |
Digital display with one touch operation |
| Chamber |
Adapted for 6 inch wafer |
| Chamber material |
SUS |
| Reaction gas |
O2,Ar,CF4 |
| Purge gas |
N2 or Dry air |
| Flow meter |
Mass flow control |
| Vacuum pump |
5000L/min |
| Gas system |
2 line (Reaction gas) , 1 line (Purge) |
| External dimension |
(W)650 x (D)700 x (H)1,480mm |
| Power supply |
AC200/220/380V 3 phase 25A |
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| Contact
us |
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