| IV600 (Magazine to Magazine
process) |
 |
| Magazine to Magazine plasma process |
|
Specifications
|
| Model |
IV600 |
| Plasma method |
RIE |
| Electrode structure |
For Magazine correspondence electrode structure |
| RF generator |
100-600W |
| Oscillating frequency |
13.56MHz |
| Control system |
LCD touch panel with PLC |
| Chamber size |
(W)230×(D)400×(H)200mm |
| Chamber material |
Aluminum |
| Reaction gas |
O2,Ar |
| Purge gas |
N2 or Dry air |
| Flow meter |
Mass flow control 2 line |
| Vacuum pump |
1000L/min |
| Gas system |
2 line (Reaction gas) , 1 line (Purge gas) |
| External dimension |
(W)1,000×(D)900×(H)970mm |
| Power supply |
AC200/220/380V 3 phase 10A |
|
| Contact
us |
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