| CV600 |
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|
Specifications
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| Model |
CV600 |
| Plasma mode |
RIE • DP |
| Electrode |
Parallel flat stage plate |
| RF generator power |
100 - 600W |
| Oscillating |
13.56MHz |
| Control system |
Digital display and one touch control |
| Chamber |
(W) 310 x (D) 220 x (H) 140mm |
| Electrode stage |
(W) 230 x (D) 140mm |
| Chamber material |
SUS |
| Reaction gas |
O2,Ar |
| Purge gas |
N2 or Dry air |
| Flow meter |
Flow meter |
| Vacuum pump |
Vacuum pump(120L/min) |
| Gas system |
2 line and purge line |
| External dimensions |
(W) 480 x (D)500 x (H) 1,065mm |
| Power supply(50/60Hz) |
AC200/220/380V Three phase 7A |
|
| Contact
us |
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