APPC-400Y

1. Does not need Vacuum system such as Vacuum pump and Vacuum chamber.
2. Reaction gas use He,Ar and O2 mixing gas for cleaning sample surface.

Loading Sample

1. Useing conveyor or Arm chuck for loading sample
2. Sample are continuance loading to electrode.
3. Un-load sample.
4. Go to next process

1. Automatic and Manual operation selectable.
2. Touch panel operation
3. Two Electrode can build in for heavy dirt cleaning of sample surface.
4. Easy to install and easy to make In-Line system.
5. Electrode and Main unit can be separately. Also, One controller can control Two Electrode.

1. Unify type : W800 x L700 x H1200mm
2. separately type : W800 x L700 x H950mm

1. Electrode unit
2. RF generator unit (In the control unit)
3. Gas flow unit (In the control unit)
4. Touch panel (On control unit)
5. Cooling unit (Option)
6. Loading and Un-loading unit (Option)

Two parallel flat plate.
Gas input hole for fill up mixing gas (He and Ar).
Also, water cooling port. (IN and OUT)

Mass flow controller system

1. Ar : Max. 5L/min
2. He : Max. 5L/min
3. Oxygen : Max. 200mL/min

Electrode spec.

1. Electrode : Aluminum Up to W300 x L50 x H20mm Water Cooling type.
2. Around electrode matirial : Quartz glass

Touch panel and programmable controller (PLC)

1. Set process recip
Gas flow
RF power
oading speed (Conveyor speed etc.)

2. Process monitor
Gas flow, RF power
Error

1. This Equipment built in safety function system.
2. Builit in safety cover for Electrode