KLA-Tencor Surface Properties Measuring System Series

[ CONTENTS ]
P-16	Alpha-Step IQ

P-16
Compact, Advanced Surface Profiling
Best-in-class step height repeatability of 7.5Å・or 0.1% (1sigma ) with sub-angstrom vertical resolution Small tabletop footprint with full 200 mm scan length capability (no stitching required) while supporting up to a 200mm wafer or other unique substrate configurations Enables process control and analysis of features below 10 nm up to approximately 1 mm in height Constant stylus force control to 0.05mg for "soft" surface measurements such as copper, gold and resist State-of-the-art Apex 2D and 3D surface analysis software with statistical process control and custom report generation features Unique design requiring movement of only the stage, and not the head, inducing less cyclical noise in to the scan -- therefore reducing measurement errors.
The P-16 is a new contact stylus profiler designed for automated step height, surface contour, and roughness measurements, and provides detailed 2D and 3D analysis of topography for a variety of surfaces and materials. This programmable surface metrology tool is utilized in a wide range of applications and industries. Typical customers include corporate R&D departments, government labs, and universities, but it is also used as a production/process-monitoring tool. Its new Sequencing feature as a standard configuration is key to capturing the needs of those customers who need added convenience of automated wafer mapping. For the power user, the Productivity Package is the ideal solution to significantly improve overall throughput and fab productivity.
Return

Alpha-Step IQ
Alpha-Step IQ Surface Profiler
Provides advanced and customizable 2D analysis capabilities. Enables easy location of measurement features via saved site image with recipe. Features excellent repeatability and reproducibility. Precisely determines and analyzes thin step heights, surface microroughness, and overall form error on thin film coatings. Provides sufficient vertical range for large topography variations. Includes multiple language support for users with a worldwide presence. Enables faster analysis routines by applying saved sets of analysis instructions.
The Alpha-Step IQ is a state-of-the-art, stylus-based surface profiler that combines high measurement precision with versatility and economy. Ideal for applications such as semiconductor pilot lines and materials research, this advanced profiler enables faster process learning and higher yields. With guaranteed 8Å(1 sigma) or 0.1% step height repeatability and sub-angstrom resolution, the Alpha-Step IQ provides excellent repeatability and performance to analyze and monitor processes.
Return

Return to Home